Solution
The reason is caused by using two SMU. If there is only one SMU to source and measure, the issue will not happen.
When using two SMU in a measurement, the SMU used for souring can be proctected by current limit.
But for the SMU used for measuring, it can't be protected by current limit settings. Even the current is more than current limit setting, it can't adjust the voltage to protect the SMU. That's why the reading of SMU is more than current limit.