Solution
Running Self-Calibration while the load or DUT is still connected is not the correct process, and you may experience unexpected behaviors, for example an Overload Protection error. The calibration manual of the SMUs mentions that the Self-Calibration requires the DUT or load to be disconnected first. Even if there doesn't seem to be any issues with the Self-Calibration while the load is connected, this is not recommended.
- The typical solution in this situation is to add an external dedicated switch to cleanly disconnect the SMU channel from the load or DUT.